Low Cost Grating Based Laser Sensor
|
Phase I
|
1998-1999
|
| Fabry-Perot Scanning Spect. for Standoff Chem. Det.
|
Phase I
|
1997-1998
|
High-Speed, High-Accuracy Stage for Adv Lithography
|
Phase I
|
1997-1998
|
High Accuracy Rotation Stage for X-Ray Diffractometry
|
Phase II |
1997-1999
|
| Water Vapor Conc. Meas. Using Diode Laser Interf |
Phase I |
1996-1997
|
High Accuracy Rotation Stage for X-Ray Diffractometry
|
Phase I
|
1996
|
| Improved Metrology for Adv Lithography
|
Phase II
|
1994-1996
|
| Improved Metrology for Adv Lithography
|
Phase I
|
1992-1993
|
Phase Stabilized Laser Diode
|
Phase I
|
1992
|
Auto Aligned Fourier Transform UV Spectometer
|
Phase II
|
1990-1993
|
In Plane Mechanical Displacement Sensor
|
Phase II
|
1990-1991
|
Multi Phase Angular Disp Measurement
|
Phase I
|
1989-1990
|
Laser Optical Detection of Mech. Displacement
|
Phase I
|
1989
|
Auto-aligned Fourier Transform UV Spectormeter
|
Phase I |
1989
|
Rapid Scan Michelson Interferometer for the UV
|
Phase II |
1988-1991
|
Laser Surface Profilometer
|
Phase I |
1988-1989
|
Precision Metrology for Michelson Interferometer
|
Phase I |
1987
|
Laser Rotation Sensor & Shaft Encoder
|
Phase II |
1987-1988
|
Laser Rotation Sensor & Shaft Encoder
|
Phase I
|
1984-1985
|
Interferometric Optical Synchro for Alignment
|
Phase I
|
1986-1987
|
Interferometric Optical Synchro for Alignment
|
Phase II
|
1987-1988
|
| Non-Contact Optical Surface Motion Monitor |
Phase I
|
1986-1987
|
Non-Contact Optical Surface Motion Monitor
|
Phase II
|
1987-1988
|
Stabilization of Fabry-Perot Etalons
|
Phase I
|
1984-1985
|
