Features:
- High repeatability
- Nanometer resolution
- Low interpolation error
- High speeds
NanoScale Linear Encoder is a laser diode-based linear incremental encoder that can
measure position relative to a linear scale with laser interferometer-level
resolution and repeatability. Unlike interferometer, however, the NanoScale Linear Encoder suffers from none
of the instability problems - such as drift, sensitivity to air
turbulence, and length of optical path - that are normally associated
with lasers.
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With its compact size, the NanoScale Linear Encoder can be easily
retrofitted to existing stages and mechanics for the ultimate upgrade
in positioning performance.
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The NanoScale A Hi-Resolution Linear Encoder features the coupling of the
NanoScale Linear Encoder sensor with OPTRA’s Hi Resolution phase
processor and signal interpolation board. This PCI bus-based processor
features fast on-board processing of the linear encoder position signals. A
single processor board can operate two sensor heads. Linear position
information is available on both the bus interface for easy software
access, or via two 60-pin headers for direct, high speed data reads at
.305nm resolution. The position data is available in a standard 32-bit
parallel word format and A-quad_B digital signal format.
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The NanoScale Linear Encoder captures the accuracy of the
laser interferometer in the manufacturing the linear encoder. The NanoScale sensor head
then collects first-order diffracted light reflected from the linear encoder.
Our patented detector measures the interference pattern and results in
an extremely stable, balanced signal with a interpolation error of less
then 10 nanometers.
NanoScale A Linear Encoder Specification Sheet
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The NanoScale B Standard Resolution Linear Encoder features the coupling of
the NanoScale Linear Encoder sensor with OPTRA’s PolarFlash signal
processor module. The ASIC-based processor module features fast
dual-axis processing of the linear encoder position signals. A single module
can operate two sensor heads. Position information is in the form of an
industry standard A-quad-B digital signal. The edge rate and resolution
are selectable, ranging from 1.25 to 10 MHz and from 20 to 156nm,
respectively.
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A NanoScale Linear Encoder captures the accuracy of the
laser interferometer in the manufacturing of the linear encoder scale. The sensor head
then collects first-order diffracted light reflected from the linear encoder scale.
Our patented detector measures the interference pattern, and results in
an extremely stable, balanced signal with a interpolation error of less
then 10 nanometers.
NanoScale B Linear Encoder Specification Sheet
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OPTRA NanoScale Linear Encoder scales fundamentally capture the inherent
accuracy of the laser interferometer in their manufacturing process.
The linear encoder scale grating is a pattern of 5µm-wide chromium lines on 10µm
centerlines. When manufactured using high precision equipment, the
accuracy of the linear encoder scale grating can be held to sub-micron tolerances.
Unlike the interferometer, the linear encoder scale suffers none of the instability
problems caused by environmental perturbations, making it an ideal
measurement tool.
OPTRA linear encoder scales can be manufactured on a number of different substrates at
various cost and accuracy levels. Standard sizes are available, and
linear encoder scales can be cut to your exact size requirements for an additional fee.
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